INVESTIGATION OF ELECTRICAL PROPERTY INHOMOGENEITIES FORMED BY PLASMA ETCHING

Origin of Electrical Signals for Plasma Etching Endpoint Detection

To investigate the electrical changes observed at plasma etching endpoints, experiments were performed in an inductively coupled, rf-biased reactor, during CF4/Ar plasma etches of silicon dioxide films on silicon substrates. The rf bias current, voltage, and impedance were measured vs. time during etching. Simultaneously, a Langmuir probe measured the electron and ion densities, ion current den...

Investigation of the Substrate Orientation-Dependent on the Electrical Characteristics of HfN Gate Insulator Formed by ECR Plasma Sputtering

investigation of effective parameters on the rigidity of light composite diaphragms (psscb) by fem

در این رساله با معرفی سقف های psscb متشکل از ترکیب ورق های فولادی ذوزنقه ای و تخته های سیمانی الیافی به عنوان سقف های پیش ساخته (سازگار با سیستم سازه ای قاب های فولادی سبک) به بررسی پارامترهای موثر بر صلبیت سقف، پرداخته می شود. در تحقیق حاضر ابتدا به مدل سازی دو نمونه سقف آزمایش شده، به روش اجزاء محدود با استفاده از نرم افزار تحلیلی abaqus ver 6.10 پرداخته شده است. نمونه های ساخته شده تحت اعما...

Nanogrids and Beehive-Like Nanostructures Formed by Plasma Etching the Self-Organized SiGe Islands

A lithography-free method for fabricating the nanogrids and quasi-beehive nanostructures on Si substrates is developed. It combines sequential treatments of thermal annealing with reactive ion etching (RIE) on SiGe thin films grown on (100)-Si substrates. The SiGe thin films deposited by ultrahigh vacuum chemical vapor deposition form self-assembled nanoislands via the strain-induced surface ro...

Microstructure and Property of Zr-Based Metallic Glass Coating Formed by Gas Tunnel Type Plasma Spraying

Metallic glass has excellent functions such as high strength and high corrosion resistance. Therefore, it is one of the most attractive materials, and various developmental research works have been conducted by many researchers. However, the metallic glass material is expensive to use, and a composite material is preferred for the industrial application. Thermal spraying method is one of potent...